Model |
IMS-320D | IMS-320U | |
---|---|---|---|
Joystick type | Inverted | Upright | |
Control method | Dual-model of speed/position,one joystick for movement control inX-Y-Z axis | ||
Dimensions (W×H×D) |
202mm×270mm×225mm | 200mm×275mm×130mm | |
Step size (computationalresolution) |
<20nm | ||
Maximum speed | 0~10,000μm/s | ||
Travelling distance | 20mm | ||
Direction of rotation | 15°-45° |